{"id":3618,"date":"2025-08-04T12:19:28","date_gmt":"2025-08-04T12:19:28","guid":{"rendered":"https:\/\/jagdamba-enterprise.in\/shop\/?post_type=product&p=3618"},"modified":"2025-08-08T06:05:32","modified_gmt":"2025-08-08T06:05:32","slug":"semiconductor-testing-chillers-fltz-series","status":"publish","type":"product","link":"https:\/\/jagdamba-enterprise.in\/shop\/product\/semiconductor-testing-chillers-fltz-series\/","title":{"rendered":"Semiconductor Testing Chillers \u2013 FLTZ Series"},"content":{"rendered":"
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Different testing requirements for in Semiconductor Industries:<\/strong><\/p>\r\n\r\n

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  • \r\n Aging test equipment:<\/strong> The matching thermal drying system provides cooling and heating\r\n temperature,\r\n improves the test efficiency and quality of wafer chips, and has small temperature accuracy error.\r\n <\/li>\r\n
  • \r\n Chip Testing Equipment:<\/strong> The thermal chiller is matched with the test machine, with a\r\n temperature control\r\n accuracy of \u00b10.05\u2103, which improves the chip testing efficiency of the institute.\r\n <\/li>\r\n
  • \r\n Semiconductor Fab:<\/strong> The process chiller is used in semiconductor fabs, with high-precision\r\n cooling and\r\n heating temperature control, which improves the manufacturing rate of wafers and reduces the scrap rate.\r\n <\/li>\r\n <\/ul>\r\n\r\n

    Overview:<\/h2>\r\n\r\n
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    • \r\n Working Temperature Range:<\/strong> -120degC to +300degC\r\n <\/li>\r\n
    • \r\n FLTZ Multichannel:<\/strong> Has Multichannel Independent Temperature control \u2013 it can have separate\r\n temperature\r\n range, cooling and heating capacity, thermal conductivity medium flow rate, etc. According to the required\r\n temperature ranges, steam compression refrigeration or ETCU non compressor heat exchange system can be\r\n selected.\r\n <\/li>\r\n
    • \r\n ZLTZ Series: <\/strong>Suitable for temperature control applications such as microchannel reactors,\r\n plate heat\r\n exchangers, cold plates, heat sink plates and tubular reactors with small heat exchange areas, large\r\n refrigeration capacities and small temperature differences. The equipment can automatically recycle the\r\n thermal conductive medium.\r\n\r\n
      \r\n The ZLTZ temperature control unit is combined with a microchannel reactor to form a high heat release\r\n temperature control application. Under the same flow condition, the heat transfer efficiency of the\r\n temperature control is more than 5 times that of the heat transfer oil. At the same time, the temperature\r\n difference between the inlet and outlet is small, and the temperature filed uniformity is high, which is\r\n particularly suitable for applications with intense heat release reactions. These units are in combination\r\n with cold plate and heat sink plate for high heat absorption and high uniformity temperature control.\r\n\r\n
      \r\n The ZLTZ temperature control unit is combined with ESC chucks, vacuum chucks, etc to achieve a temp control\r\n range of -65 to 200degC. At the same time, one ZLTZ TCU with multiple ESC chucks can control different\r\n temperatures.\r\n <\/li>\r\n
    • \r\n LQ Series:<\/strong> These models use non corrosive gas as a cooling medium such as dry compressed\r\n air, nitrogen,\r\n argon and other normal temperature gas. The gas can reach the targeted low temperature, supply the demanded\r\n test components or heat exchangers.\r\n <\/li>\r\n
    • \r\n AI Series:<\/strong> Suitable models are also used in low and high temperature testing of\r\n semiconductor equipment.\r\n Electronic equipment high temperature and low temperature thermostat testing cold and heat sources. They can\r\n work for continuously long time, automatic defrost and it will also not affect the storage temperature\r\n during defrosting. Does no affect the Evaporation process during defrosting.\r\n <\/li>\r\n
    • \r\n AES Series:<\/strong> These Series have jet flow high and low temperature impact tester provides\r\n precise and rapid\r\n ambient temperature for chips, modules, integrated circuit boards, electronic components, etc. It is an\r\n indispensable instrument for electrical performance test, failure analysis and reliability evaluation of\r\n products.\r\n <\/li>\r\n
    • \r\n AET Series:<\/strong> In these models the compressed air enters the gas rapid temperature change\r\n testing machine,\r\n which is equipped with a dryer. The gas is pre dried to a dew point temperature of -70degC or below and then\r\n cooled, heated and controlled to output stable flow, pressure and constant temperature gas. The temperature\r\n of the target object is controlled (various temp control chucks, chamber environments, heat support plates,\r\n material shuttles, chambers, electronic components, etc) and the temperature of the process can be\r\n controlled according to the temperature sensor on the remote chuck and then the temperature of the output\r\n gas can be automatically adjusted.\r\n <\/li>\r\n
    • \r\n Rapid Temp Change temp control Chuck:<\/strong> This product enables rapid temp changes and precise\r\n temp control. The system itself comes with a chiller to avoid the consumption of liquid nitrogen, carbon\r\n dioxide, etc. Each system contains a chuck and a cold and heat control unit.\r\n\r\n
      \r\n\r\n The system provides an open flat surface working platform, rapid rise and fall, constant temperature\r\n control, used in RF devices and high-density power device testing (IGBTs and MOSFETSs), can also be used in\r\n laboratory flat plate rapid cooling (Plasma, biological products, batteries), etc.\r\n\r\n
      \r\n\r\n The direct refrigerant evaporation method is used inside the plate, which greatly improves the heat transfer\r\n efficiency and improves the heat transfer power per unit area of the plate compared with the liquid cooling\r\n method.\r\n <\/li>\r\n <\/ul>\r\n\r\n\r\n \r\n \r\n \r\n \r\n \r\n \r\n \r\n \r\n \r\n \r\n \r\n \r\n \r\n \r\n \r\n \r\n \r\n
      FLTZ Series<\/th>\r\n <\/tr>\r\n
      Model<\/th>\r\n FLTZ-002
      FLTZ-002W<\/th>\r\n       		FLTZ-003
      FLTZ-003W<\/th>\r\n       		FLTZ-004
      FLTZ-004W<\/th>\r\n       		FLTZ-006
      FLTZ-006W<\/th>\r\n       		FLTZ-008
      FLTZ-008W<\/th>\r\n       		FLTZ-010
      FLTZ-010W<\/th>\r\n       		FLTZ-015
      FLTZ-015W<\/th>\r\n <\/tr>\r\n
      Temp Range<\/td>\r\n +5\u00b0C to +90\u00b0C<\/td>\r\n <\/tr>\r\n
      Temp Control accuracy<\/td>\r\n \u00b10.05\u00b0C (Steady State Outlet Temperature)<\/td>\r\n <\/tr>\r\n
      Cooling capacity @10\u00b0C<\/td>\r\n 6kW<\/td>\r\n 8kW<\/td>\r\n 10kW<\/td>\r\n 15kW<\/td>\r\n 20kW<\/td>\r\n 25kW<\/td>\r\n 40kW<\/td>\r\n <\/tr>\r\n
      Internal circulating fluid volume<\/td>\r\n 4L<\/td>\r\n 5L<\/td>\r\n 6L<\/td>\r\n 8L<\/td>\r\n 10L<\/td>\r\n 12L<\/td>\r\n 20L<\/td>\r\n <\/tr>\r\n
      Expansion tank volume<\/td>\r\n 10L<\/td>\r\n 10L<\/td>\r\n 15L<\/td>\r\n 15L<\/td>\r\n 20L<\/td>\r\n 25L<\/td>\r\n 35L<\/td>\r\n <\/tr>\r\n
      Refrigerant<\/td>\r\n R410A<\/td>\r\n <\/tr>\r\n
      Refrigerating Medium<\/td>\r\n Silicon Oil, fluortinated liquid, polyol aqueous solution, DI, etc (DI temp needs to be\r\n controlled above 10\u00b0C)<\/td>\r\n <\/tr>\r\n
      Connection size<\/td>\r\n ZG1\/2<\/td>\r\n ZG1\/2<\/td>\r\n ZG3\/4<\/td>\r\n ZG3\/4<\/td>\r\n ZG3\/4<\/td>\r\n ZG1<\/td>\r\n ZG1<\/td>\r\n <\/tr>\r\n
      Cooling water connection size<\/td>\r\n ZG1\/2<\/td>\r\n ZG1\/2<\/td>\r\n ZG3\/4<\/td>\r\n ZG1<\/td>\r\n ZG1<\/td>\r\n ZG1<\/td>\r\n ZG1 1\/8<\/td>\r\n <\/tr>\r\n
      Cooling water flow @20\u00b0C<\/td>\r\n 1.5m\u00b3\/H<\/td>\r\n 2m\u00b3\/H<\/td>\r\n 2.5m\u00b3\/H<\/td>\r\n 4m\u00b3\/H<\/td>\r\n 4.5m\u00b3\/H<\/td>\r\n 5.6m\u00b3\/H<\/td>\r\n 9m\u00b3\/H<\/td>\r\n <\/tr>\r\n
      Process temperature Control<\/td>\r\n The remote target temperature can be controlled by combining the self created model free\r\n self built tree algorithm and cascade algorithm<\/td>\r\n <\/tr>\r\n
      Dimension(cm)<\/td>\r\n 95*38*106<\/td>\r\n 95*38*106<\/td>\r\n 95*38*106<\/td>\r\n 98*43*140<\/td>\r\n 98*43*140<\/td>\r\n 108*60*150<\/td>\r\n 108*60*150<\/td>\r\n <\/tr>\r\n <\/tbody>\r\n <\/table>\r\n<\/div>\r\n\r\n\r\n\r\n \r\n \r\n \r\n \r\n \r\n \r\n \r\n \r\n \r\n \r\n \r\n \r\n \r\n \r\n \r\n \r\n
      FLTZ Series<\/th>\r\n <\/tr>\r\n
      Model<\/th>\r\n FLTZ-202
      FLTZ-202W<\/th>\r\n       		FLTZ-203
      FLTZ-203W<\/th>\r\n       		FLTZ-204
      FLTZ-204W<\/th>\r\n       		FLTZ-206
      FLTZ-206W<\/th>\r\n       		FLTZ-208
      FLTZ-208W<\/th>\r\n       		FLTZ-210
      FLTZ-210W<\/th>\r\n       		FLTZ-215
      FLTZ-215W<\/th>\r\n <\/tr>\r\n\r\n
      Temp Range<\/td>\r\n -25\u00b0C to +90\u00b0C<\/td>\r\n <\/tr>\r\n
      Temp Control accuracy<\/td>\r\n \u00b10.05\u00b0C (Steady State Outlet Temperature)<\/td>\r\n <\/tr>\r\n
      Flow Control<\/td>\r\n 10 – 25L\/min<\/td>\r\n 15 – 45L\/min<\/td>\r\n 25 – 75L\/min<\/td>\r\n <\/tr>\r\n
      Cooling capacity @ -15\u00b0C<\/td>\r\n 2kW<\/td>\r\n 3kW<\/td>\r\n 3.8kW<\/td>\r\n 6kW<\/td>\r\n 7.6kW<\/td>\r\n 10kW<\/td>\r\n 15kW<\/td>\r\n <\/tr>\r\n
      Internal circulating fluid volume<\/td>\r\n 4L<\/td>\r\n 5L<\/td>\r\n 6L<\/td>\r\n 8L<\/td>\r\n 10L<\/td>\r\n 12L<\/td>\r\n 20L<\/td>\r\n <\/tr>\r\n
      Expansion tank volume<\/td>\r\n 10L<\/td>\r\n 10L<\/td>\r\n 15L<\/td>\r\n 15L<\/td>\r\n 20L<\/td>\r\n 25L<\/td>\r\n 35L<\/td>\r\n <\/tr>\r\n
      Refrigerant<\/td>\r\n R448A<\/td>\r\n <\/tr>\r\n
      Refrigerating Medium<\/td>\r\n Silicon Oil, fluortinated liquid, glycol solution, etc<\/td>\r\n <\/tr>\r\n
      Connection size<\/td>\r\n ZG1\/2<\/td>\r\n ZG1\/2<\/td>\r\n ZG3\/4<\/td>\r\n ZG3\/4<\/td>\r\n ZG3\/4<\/td>\r\n ZG1<\/td>\r\n ZG1<\/td>\r\n <\/tr>\r\n
      Cooling water connection size<\/td>\r\n ZG1\/2<\/td>\r\n ZG1\/2<\/td>\r\n ZG3\/4<\/td>\r\n ZG3\/4<\/td>\r\n ZG1<\/td>\r\n ZG1<\/td>\r\n ZG1 1\/8<\/td>\r\n <\/tr>\r\n
      Cooling water flow @20\u00b0C<\/td>\r\n 1.2m\u00b3\/H<\/td>\r\n 1.6m\u00b3\/H<\/td>\r\n 2.6m\u00b3\/H<\/td>\r\n 3.6m\u00b3\/H<\/td>\r\n 5.5m\u00b3\/H<\/td>\r\n 7m\u00b3\/H<\/td>\r\n 10.2m\u00b3\/H<\/td>\r\n <\/tr>\r\n
      Process temperature Control<\/td>\r\n The remote target temperature can be controlled by combining the self created model free\r\n self built tree algorithm and cascade algorithm<\/td>\r\n <\/tr>\r\n
      Dimension(cm)<\/td>\r\n 95*38*106<\/td>\r\n 95*38*106<\/td>\r\n 95*38*106<\/td>\r\n 98*43*140<\/td>\r\n 98*43*140<\/td>\r\n 108*60*150<\/td>\r\n 108*60*150<\/td>\r\n <\/tr>\r\n <\/tbody>\r\n<\/table>\r\n\r\n\r\n\r\n\r\n\r\n \r\n \r\n \r\n \r\n \r\n \r\n \r\n \r\n \r\n \r\n \r\n \r\n \r\n \r\n \r\n \r\n \r\n
      FLTZ Series<\/th>\r\n <\/tr>\r\n
      Model<\/th>\r\n FLTZ-402
      FLTZ-402W<\/th>\r\n       		FLTZ-403
      FLTZ-403W<\/th>\r\n       		FLTZ-404
      FLTZ-404W<\/th>\r\n       		FLTZ-406
      FLTZ-406W<\/th>\r\n       		FLTZ-408
      FLTZ-408W<\/th>\r\n       		FLTZ-410
      FLTZ-410W<\/th>\r\n       		FLTZ-415
      FLTZ-415W<\/th>\r\n <\/tr>\r\n
      Temp Range<\/td>\r\n -45\u00b0C to +90\u00b0C<\/td>\r\n <\/tr>\r\n
      Temp Control accuracy<\/td>\r\n \u00b10.05\u00b0C (Steady State Outlet Temperature)<\/td>\r\n <\/tr>\r\n
      Flow Control<\/td>\r\n 10 – 25L\/min 5bar max<\/td>\r\n 15 – 45L\/min 5bar max<\/td>\r\n 25 – 75L\/min 5bar max<\/td>\r\n <\/tr>\r\n
      Heating<\/td>\r\n Using Compressor Heating, prevent condenser frosting technology<\/td>\r\n <\/tr>\r\n
      Cooling capacity @ -35\u00b0C<\/td>\r\n 1kW<\/td>\r\n 1.4kW<\/td>\r\n 1.8kW<\/td>\r\n 2.5kW<\/td>\r\n 3.3kW<\/td>\r\n 5kW<\/td>\r\n 8kW<\/td>\r\n <\/tr>\r\n
      Internal circulating fluid volume<\/td>\r\n 4L<\/td>\r\n 5L<\/td>\r\n 6L<\/td>\r\n 8L<\/td>\r\n 10L<\/td>\r\n 12L<\/td>\r\n 20L<\/td>\r\n <\/tr>\r\n
      Expansion tank volume<\/td>\r\n 10L<\/td>\r\n 10L<\/td>\r\n 15L<\/td>\r\n 15L<\/td>\r\n 20L<\/td>\r\n 25L<\/td>\r\n 35L<\/td>\r\n <\/tr>\r\n
      Refrigerant<\/td>\r\n R448A<\/td>\r\n <\/tr>\r\n
      Refrigerating Medium<\/td>\r\n Silicon Oil, fluortinated liquid, glycol solution, etc<\/td>\r\n <\/tr>\r\n
      Connection size<\/td>\r\n ZG1\/2<\/td>\r\n ZG1\/2<\/td>\r\n ZG3\/4<\/td>\r\n ZG3\/4<\/td>\r\n ZG3\/4<\/td>\r\n ZG1<\/td>\r\n ZG1<\/td>\r\n <\/tr>\r\n
      Cooling water connection size<\/td>\r\n ZG1\/2<\/td>\r\n ZG3\/4<\/td>\r\n ZG3\/4<\/td>\r\n ZG1<\/td>\r\n ZG1<\/td>\r\n ZG1<\/td>\r\n ZG1 1\/8<\/td>\r\n <\/tr>\r\n
      Cooling water flow @20\u00b0C<\/td>\r\n 1.5m\u00b3\/H<\/td>\r\n 2.4m\u00b3\/H<\/td>\r\n 3.5m\u00b3\/H<\/td>\r\n 5m\u00b3\/H<\/td>\r\n 5.5m\u00b3\/H<\/td>\r\n 6m\u00b3\/H<\/td>\r\n 8m\u00b3\/H<\/td>\r\n <\/tr>\r\n
      Process temperature Control<\/td>\r\n The remote target temperature can be controlled by combining the self created model free\r\n self built tree algorithm and cascade algorithm<\/td>\r\n <\/tr>\r\n
      Dimension(cm)<\/td>\r\n 95*38*106<\/td>\r\n 95*38*106<\/td>\r\n 95*38*106<\/td>\r\n 98*43*140<\/td>\r\n 98*43*140<\/td>\r\n 108*50*150<\/td>\r\n 108*50*150<\/td>\r\n <\/tr>\r\n <\/tbody>\r\n<\/table>","protected":false},"excerpt":{"rendered":"
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      Semiconductor manufacturing is a process with extremely high environmental requirements, and strict temperature control determines the performance of the product. Semiconductor chillers are commonly used in semiconductor industry packaging and testing processes, semiconductor FAB process temperature control, cooling of CMOS\/CCD sensors in semiconductor metrology systems, circulating cooling of semiconductor metrology AOI systems, providing independent temperature control for cavity side walls, plasma bevel etching and deposition, thermal atomic layer etching of metal tungsten, etc. <\/p>\r\n

      Variable frequency pump can adjust the circulating liquid pressure and flow rate. The output pressure and flow rate of the circulating liquid can be set on the operation panel.<\/p>\r\n<\/div>","protected":false},"featured_media":3619,"comment_status":"open","ping_status":"closed","template":"","meta":{"_acf_changed":false},"product_cat":[171],"product_tag":[],"acf":[],"_links":{"self":[{"href":"https:\/\/jagdamba-enterprise.in\/shop\/wp-json\/wp\/v2\/product\/3618"}],"collection":[{"href":"https:\/\/jagdamba-enterprise.in\/shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/jagdamba-enterprise.in\/shop\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/jagdamba-enterprise.in\/shop\/wp-json\/wp\/v2\/comments?post=3618"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jagdamba-enterprise.in\/shop\/wp-json\/wp\/v2\/media\/3619"}],"wp:attachment":[{"href":"https:\/\/jagdamba-enterprise.in\/shop\/wp-json\/wp\/v2\/media?parent=3618"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/jagdamba-enterprise.in\/shop\/wp-json\/wp\/v2\/product_cat?post=3618"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/jagdamba-enterprise.in\/shop\/wp-json\/wp\/v2\/product_tag?post=3618"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}